发明名称 HEATING FURNACE AND MANUFACTURING METHOD OF SOLAR CELL ELEMENT USING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a heating furnace or the like capable of reducing variations in the temperature received by a workpiece. <P>SOLUTION: A heating furnace 1 heating a workpiece 5 inside comprises a conveying means 2 for mounting the workpiece 5 for conveying it in the heating furnace 1, a heating means 3 arranged inside the heating furnace 1 for heating the workpiece 5, and a heat control means 6 for indirectly transmitting the heat obtained by the heating means 3 to the workpiece 5. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2006310792(A) 申请公布日期 2006.11.09
申请号 JP20060066093 申请日期 2006.03.10
申请人 KYOCERA CORP 发明人 OWADA HIROTO;KANEKO TOSHIHIKO;MATSUBARA YASUHIRO;YONEKURA NORIHIRO
分类号 H01L31/04 主分类号 H01L31/04
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