| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a compact device for measuring flow rate with high measurement accuracy and low-pressure loss that prevents infiltration of dust. <P>SOLUTION: The device includes an inlet passage 22, where an upstream side of a sub-passage side is connected to an inlet 21 of a first branch point and the downstream side thereof is a second branch point 20a, a first sub-passage 23 where the upstream side is branched from the inlet passage 22 at the second branch point 20a, to form in parallel with a main passage 12 and the downstream side is connected to an outlet 28, a second sub-passage 24, where the upstream side is branched from the passage 22 at the second branch point 20a and is intersected with the main passage 12, and a third sub-passage (detection passage) 25, where the upstream side is connected to the downstream side of the passage 24 and a flow rate detecting element is arranged, and then a downstream side is connected to the outlet 28. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
