| 摘要 |
PROBLEM TO BE SOLVED: To provide a combinatorial material evaluation board for measuring each kind of physical property value, such as film thickness and the value of resistance, without damaging a substrate by the charged particle of plasma when film-forming an integrated library. SOLUTION: In a ground layer that is provided via an insulating/separation layer provided on the substrate and is insulated from the substrate and a film-formation material in the evaluation method of the combinatorial material for manufacturing a group of film-formation samples on the substrate by a film-forming means including charged particles and evaluating the physical properties, or the like. The charged particles in film formation are grounded for neutralization and then reach the substrate for film formation. Then, the insulating/separation layer is removed. The surface of the substrate is exposed to the removed section. The group of film-formation samples are manufactured at a part other than the insulating/separation layer, and the physical properties, or the like of the group of film-formation samples are evaluated by a terminal for sensors provided on the substrate. COPYRIGHT: (C)2007,JPO&INPIT
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