发明名称 Wafer carrier checker and method of using same
摘要 A tool and method for assessing whether a disk carrier, and especially a carrier for holding semiconductor disks, is properly dimensioned. The tool has a body that includes a socket in which a portion of the disk carrier will seat fully if the disk carrier is properly dimensioned. Alignment structures may be provided in the socket to align with features of the carrier to assist in determining whether the disk carrier is properly dimensioned. The socket may include two spaced apart cavities that correspond with end portions of walls of the disk carrier.
申请公布号 US2006252351(A1) 申请公布日期 2006.11.09
申请号 US20050121367 申请日期 2005.05.04
申请人 MICREL, INCORPORATED 发明人 KUNDRACIK MICHAEL J.
分类号 B24B49/00;B24B1/00;B24B7/30 主分类号 B24B49/00
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