发明名称 |
CASSETTE STORAGE AND TREATMENT FACILITY FOR PLATE TO BE TREATED |
摘要 |
PROBLEM TO BE SOLVED: To perform detection of a support position of a plate to be treated in a cassette during conveying in an automatic warehouse in a facility in which a storage automatic warehouse of the cassette for storing the plate to be treated and a treatment device for performing processing treatment of the plate to be treated taken out from the cassette are combined. SOLUTION: The cassette storage and the treatment facility for the plate to be treated are provided with a cassette storage shelf 25A for three-dimensionally storing the cassette K for storing a plurality of sheets of the plates to be treated in multi-stages; an arrival/delivery device 1 capable of traveling along the storage shelf 25A and provided with a cassette transferring means 7 on a lifting carriage 6; and a plate taking out/conveying-in device 31A for taking out the plate to be treated from the cassette K delivered from the arrival/delivery device 1 every one sheet and feeding to the treatment device 30A. A plate detection device 42 for obtaining mapping data of the plate to be treated in the cassette K transferred from the inside of the storage shelf 25A onto the lifting carriage 6 is mounted on the lifting carriage 6 of the arrival/delivery device 1. COPYRIGHT: (C)2007,JPO&INPIT |
申请公布号 |
JP2006306504(A) |
申请公布日期 |
2006.11.09 |
申请号 |
JP20050124816 |
申请日期 |
2005.04.22 |
申请人 |
DAIFUKU CO LTD |
发明人 |
MORIYA SUSUMU;ONO TAKAYOSHI |
分类号 |
B65G1/04;B65G49/06;B65G49/07;H01L21/67 |
主分类号 |
B65G1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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