| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a resin-filled substrate which can prevent unfilling of an opening and roll-in of a void and has small polishing load (excellent in productivity). <P>SOLUTION: The method of manufacturing a resin-filled substrate is used which includes a process of rotating non-contact roll (R) at a circumferential velocity (v) (mm/sec.) so that the rotation direction of a portion of a substrate from a rotation axis is opposite to a moving direction while linearly moving the non-contact roll (R) at a moving velocity (i) (mm/sec.) in a direction horizontal to a substrate face and a direction vertical to the rotation axis of the (R), and filling a resin paste (J) having a loss elasticity (G") of 50-100,000 Pa into the opening provided on the substrate. In this method, the moving velocity (i) and the circumferential velocity (v) are in a relation of v≥10×i. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
