| 摘要 |
PROBLEM TO BE SOLVED: To rapidly and simply measure cleanliness of an object to be measured, such as a glass substrate or the like, without requiring a special device, such as image recognition device or the like. SOLUTION: A droplet 10 is dropped onto a surface of the object to be measured 1, such as the glass substrate or the like by using a dispenser 2. Since a certain degree of cleaning finishing has been applied to the object to be measured 1, the droplet 10 dropped spreads in circular form, as time elapses. A screen 3, used as a scale, is disposed below the object to be measured 1. When light is supplied from the upper position of the object to be measured 1, image of the droplet 10 is projected on the screen 3. The screen 3 has a scale mark M, consisting of X-axis and Y-axis, and the cleanliness of the object to be measured 1 is measured, based on the scale mark M and the image of the droplet 10 projected to the screen 3. COPYRIGHT: (C)2007,JPO&INPIT
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