| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring method capable of measuring the three-dimensional shape accurately in a short time. SOLUTION: A lattice fringe image is projected to an object 1 to be measured having a three-dimensional shape from a shape measuring light source 2, and a measured value of the three-dimensional shape of the object 1 is acquired from the lattice fringe image imaged by a shape measuring imager 26. The object 1 is irradiated with a contour measuring light source 14 having a different wavelength from the light source 2 simultaneously with projection from the light source 2, and the object 1 is imaged simultaneously by the shape measuring imager 26 for imaging the lattice fringe image by the light source 2 and by a contour measuring imager 28 for imaging an irradiation image by the contour measuring light source 14. The measured value of a three-dimensional contour of the object 1 is acquired, based on the three-dimensional shape of the object 1 acquired from the lattice fringe image imaged by the shape measuring imager 26 and a two-dimensional contour of the object 1 acquired by the contour measuring imager 28. COPYRIGHT: (C)2007,JPO&INPIT
|
