| 摘要 |
PROBLEM TO BE SOLVED: To provide a plate member surface flaw repairing device, capable of effectively eliminating flaws generated in the surface of a plate member such as a glass substrate. SOLUTION: This device is provided with a holding member 2 to hold a plate member W, a plane motion mechanism 3 for making plane motion of the holding member in the surface direction of the plate member, a rod-shaped grindstone 4 having an arc-shaped end part K that can be put in contact with the surface of the plate member, a grindstone rotation mechanism 5 to rotate the rod-shaped grindstone around its axis O, and a pressure contact mechanism 6 capable of putting the arc-shaped end part of the rod-shaped grindstone in contact with the surface of the plate member under pressure. COPYRIGHT: (C)2007,JPO&INPIT
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