| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment method of wastewater containing fluorine ions and fluorine compounds which can be surely apply to strict effluent standard values with a low-cost equipment in treatment of wastewater from a semiconductor manufacturing apparatus or the like. SOLUTION: In the treatment method of wastewater containing fluorine ions and/or fluorine compounds, solid matter is produced by using a calcium compound, a sulfite compound, and an inorganic coagulant to separate the solid matter from the wastewater. COPYRIGHT: (C)2007,JPO&INPIT
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