METHOD OF FORMING LAMINATED FILM

摘要

PROBLEM TO BE SOLVED: To provide a simple method for forming a laminated film made of a silicon film and a silicon oxide film on a substrate. SOLUTION: By the method of forming the laminated film, the laminated film made of a silicon film and a silicon oxide film is formed on the substrate from a composition for film formation containing a silane compound and a solvent. COPYRIGHT: (C)2007,JPO&INPIT