CNTS-INSULATOR-SEMICONDUCTOR SYSTEM FOR CHEMICAL AND BIOLOGICAL SENSOR APPLICATIONS

摘要

An ECIS(Electrolyte Carbon nano tube Insulator Semiconductor system) for a chemical and biological sensor is provided to acquire a high sensibility by using an improved alumina nano frame with a multi-wall carbon nano tube. An ECIS for a chemical and biological sensor comprises a substrate layer(100), an alumina nano frame, and an electrolyte. The alumina nano frame is formed on the substrate layer. The alumina nano frame includes a multi-wall carbon nano tube(103). The electrolyte(105) is used for covering the multi-wall carbon nano tube of the alumina nano frame. The ECIS further includes a cover layer for covering an edge portion of the alumina nano frame.