摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small-sized furnace for anti-oxidation treatment of a graphite material capable of reducing a workload and cost accompanied by exchange of a heating source and a method for anti-oxidation treatment of a graphite material. <P>SOLUTION: The furnace for anti-oxidation treatment of a graphite material 10 is equipped with a treatment container 12, an inert gas introducing and discharging part 14, a material placing part 16, a heat-insulating box 18, and a microwave irradiation apparatus 20. The microwave irradiation apparatus 20 is equipped with a microwave oscillator 38 and a waveguide 40 whose opening is placed right above a perforated plate made of graphite 30 in the treatment container 12. A graphite material to be treated W, which is treated beforehand by a chemical or the like, is placed in the heat-insulating box 18 inside the treatment container 12, in allowing an inert gas to flow a microwave is generated by the microwave oscillator 38, and the microwave is irradiated into the treatment container 12 through the waveguide 40. By the microwave irradiated through slits 36 formed at the heat-insulating box 18, the graphite material to be treated W is heated up to 800°C and heat-treated. <P>COPYRIGHT: (C)2007,JPO&INPIT |