| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus which improves the stability of the vibration at a resonant frequency and guarantees the optical resolution of a device in designing a MEMS (Micro-Electro-Mechanical System) scanning mirror. SOLUTION: The micro-electro-mechanical system (MEMS) mirror apparatus includes a mirror, bonding pads, springs, and beams connected to the mirror. The mirror has a width greater than 1000 and less than 1200 microns, a length greater than 4000 and less than 5500 microns, and a thickness greater than 240 microns. Each beam includes a plurality of rotational comb teeth and is connected by springs to the bonding pads. COPYRIGHT: (C)2007,JPO&INPIT
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