发明名称 |
PROBE USED FOR OPTICALLY MEASURING SCANNING PROBE EXCITATION AND MANUFACTURING METHOD FOR SAME PROBE |
摘要 |
PROBLEM TO BE SOLVED: To manufacture, with a high throughput, such a probe in which only its end part scatters excitation light, in order to realize high resolution by causing the probe to detect a Raman signal from only its probe-end adjacent part. SOLUTION: An end of a probe substrate formed out of a material transparent with respect to the excitation light is coated with a substance from which a substance or metal of a large refractive index insolubilized in a developing solution separates out when it is irradiated with active light. Only the coated end portion of the probe is developed by irradiating it with active light. This causes the substance or metal of a large refractive index to be carried only on the end portion. COPYRIGHT: (C)2007,JPO&INPIT
|
申请公布号 |
JP2006308438(A) |
申请公布日期 |
2006.11.09 |
申请号 |
JP20050131755 |
申请日期 |
2005.04.28 |
申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY |
发明人 |
TADA TETSUYA;KANAYAMA TOSHIHIKO;VLADIMIR POBORCHII |
分类号 |
B82B1/00;B82B3/00;G01Q60/22 |
主分类号 |
B82B1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|