| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure detecting device with sufficient thermal response by reducing influence on detection property by thermal stress as much as possible. SOLUTION: The pressure detecting device 100 includes a pressure detecting element 110 for converting distortion generated under pressure to electrical signal to output, a device substrate section 120 including an element storing section 121 for storing the pressure detecting element 110, and a connecting section 129, that intervenes between these pressure detecting element 110 and the element storing section 121, connecting the both with tensile coefficient of extension of≥about 400%. COPYRIGHT: (C)2007,JPO&INPIT
|
