| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic electronic material coating apparatus in which an organic electronic device comprising an organic electronic material layer can be produced at a high yield and a low coat by a nozzle coating method, and a production method of an organic electronic device using the coating apparatus. SOLUTION: In the organic electronic material coating apparatus, speed information of a coating nozzle is input from an X-axis driver 61 which moves the coating nozzle in an X-axis direction along a scanning line by a linear servo motor 23 and an encoder 24, position information of the coating nozzle in a Y-axis direction is input from a Y-axis driver 62, flow rate information for feeding an organic EL material solution detected by a flow meter 53 to the coating nozzle is input from a pump control circuit 6, and pass/fail decisions of the three kinds of information are then made based on the respective predetermined standards at a pass/fail decision section 66 of a controller 6, and defective information obtained from the pass/fail decisions made is output to an entire control section 67 at the time of completing coating in all lines. COPYRIGHT: (C)2007,JPO&INPIT
|
