发明名称 Processes of forming small diameter rods and tubes
摘要 The invention provides a method for the production of a photonic device comprising providing a substrate, forming in the substrate substantially straight pores, lining or filling the pores with a material having voltage-dependent index of refraction, and removing part but not all of the substrate materials so that an array remains of tubes or rods of material having. voltage-dependent index of refraction. In a variant of the method the deposited material is piezoelectric and the substrate is completely removed, resulting in piezoelectric tubes or rods of small diameter, generally below 10 mum.
申请公布号 US2006249070(A1) 申请公布日期 2006.11.09
申请号 US20040544816 申请日期 2004.02.05
申请人 MORRISON FINLAY D;SCOTT JAMES F 发明人 MORRISON FINLAY D.;SCOTT JAMES F.
分类号 H01L21/322;G02B6/122;H01L41/317;H01L41/39 主分类号 H01L21/322
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