Rapid, automatic evaporation coating apparatus, e.g. for coating bulk materials with metal, comprises chamber with openable wall section and movable external device for supplying coating material to evaporator

摘要

In vacuum coating apparatus consisting of an evacuable processing chamber (1) with thermal evaporators, a workpiece holder (2), an aerator and an evacuator, a wall region parallel to the holder axis is a closure for an opening; the evaporators are in series parallel to the holder axis; and a movable supply device (3) outside the chamber has a gripper for material to be evaporated, movable towards the evaporator or towards a magazine outside the chamber. In vacuum coating apparatus consisting of an evacuable processing chamber (1) with thermal evaporators, a rotatably mounted and driven workpiece holder (2), an aerator and a coupled evacuator, a wall region parallel to the holder axis is a closure covering an opening larger than the holder. The evaporators are in at least one series parallel to the holder axis. A supply device (3), outside the chamber, is movable parallel to the holder axis and has a gripper for material to be evaporated, movable towards the evaporator or towards a magazine outside the chamber.