发明名称 REFLECTIVE MIRROR DEVICE AND EXPOSURE DEVICE EMPLOYING IT
摘要 <P>PROBLEM TO BE SOLVED: To correct an optical aberration by deforming the surface of a reflective mirror into a smooth configuration with a simple constitution. <P>SOLUTION: The reflective mirror device is provided with the reflective mirror for reflecting light, a bulkhead unit for forming a plurality of airtight air chambers between the reflective mirror and itself, and an regulating device for regulating an air pressure in at least one air chamber among the plurality of air chambers. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006310577(A) 申请公布日期 2006.11.09
申请号 JP20050131834 申请日期 2005.04.28
申请人 CANON INC 发明人 UCHIDA SHINJI;SAI CHOSHOKU;ASADA KATSUMI;ITO HIROHITO;SAKINO SHIGEO
分类号 H01L21/027;G02B5/10;G03F7/20 主分类号 H01L21/027
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