| 摘要 |
<P>PROBLEM TO BE SOLVED: To disperse and support a load, to smoothly move a table in the XYθ directions, and to hold the place of the table even when an external force works to the table. <P>SOLUTION: An alignment device has one or three motors, has a plurality of translation rolling mechanisms having two degrees of translation freedoms and one degree of a rotary freedom so that the sum total of the motors reaches three or more, and arranges the translation rolling mechanisms so that the table can be moved in the translation direction and the direction of a rotation. The alignment device has a command means 8 for commanding the quantities of movements from a correction means 10 for correcting the place of the table 4 to the translation rolling mechanisms 6, on the basis of a positional information from a two-dimensional position sensor 9. <P>COPYRIGHT: (C)2007,JPO&INPIT |
