摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a composition having improved adhesivity between a substrate and a metal fine particle (especially metal nanoparticle). <P>SOLUTION: The composition comprises a polysilane compound, a metal compound (e.g. noble metal compound) to form the metal fine particle by reduction and an inorganic fine particle (silica). The polysilane compound may be a copolymer of a polysilane and a vinyl monomer containing a unit having affinity for a metal compound and/or a metal fine particle. A substrate is coated with the composition, the polysilane compound is decomposed by action of active energy ray to form a metal fine particle. The method is applied to various methods, for example, a substrate is coated with the composition, exposed to light to form a metal fine particle, which is developed to form a pattern containing the metal fine particle and an electroless plating pattern is formed by an electroless plating treatment. <P>COPYRIGHT: (C)2007,JPO&INPIT |