| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus and the method capable of excellently monitoring machining condition of a workpiece and enhancing controllability of the machining without degrading productivity. <P>SOLUTION: The apparatus comprises: a laser irradiation part 10 having a laser oscillator 11 and a beam shape converting mechanism 12; a photodetector 40 for detecting reflected light from a workpiece 2 by a laser beam of a specific wavelength emitted from the laser irradiation part 10; and a laser controller 50 for controlling at least either the laser oscillator 11 or the beam shape converting mechanism 12 based on the detection result of the photodetector 40, wherein the photodetector 40 is characterized in that it selectively detects light of a specific wavelength. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
