| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method that can form an alteration layer with a prescribed thickness at a deep position from the entering face of a laser beam in a workpiece. <P>SOLUTION: This is a laser beam machining method in which a laser beam oscillated from a laser beam oscillation means is converged inside a workpiece through an objective condensing lens to form an alteration layer inside the workpiece. The laser beam is made incident to the objective condensing lens so that a shading loss of the laser beam by the lens is 25-35%. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
