| 摘要 |
PROBLEM TO BE SOLVED: To provide a differential interference microscope capable of surely removing visual field irregularity and yielding an excellent differential interference image even though an incident angle on a double refraction member is large. SOLUTION: The differential interference microscope is equipped with illumination means (11 to 16) illuminating an object through a first double refraction part 15, and image-formation means (14 to 17) forming the differential interference image of the object through a second double refraction part 15. The first and the second double refraction parts concurrently include one or more first optical members showing positive double refractivity and one or more second optical members showing negative double refractivity. The first and the second optical members satisfy conditional expressions (¾no1-ne2¾<ε, ¾ne1-no2¾<ε). no1 and ne1 mean the refractive indexes of the first optical member to a normal light beam and an abnormal light beam, no2 and ne2 mean the refractive indexes of the second optical member to the normal light beam and the abnormal light beam, andεmeans a threshold showing the tolerance of a difference between the refractive indexes. COPYRIGHT: (C)2007,JPO&INPIT
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