发明名称 Device for operating gas in vacuum or low-pressure environment and for observation of the operation
摘要 A device for operating gas in the vacuum or low-pressure environment and for observation of the operation includes a housing. The housing has a thinner part formed at a side thereof, and at least one spacer mounted therein for partitioning off its inside into a gas chamber and at least one buffer chamber outside the gas chamber. The gas chamber has two inner apertures provided on the spacers above and below the gas chamber. The housing has two outer apertures provided respectively on a top side thereof and a bottom side thereof. All of the inner and outer apertures are coaxial with one another and located on the thinner part. The housing has a pumping port for communication with the buffer chamber, and a gas inlet for communication with the gas chamber.
申请公布号 US2006249687(A1) 申请公布日期 2006.11.09
申请号 US20050216049 申请日期 2005.09.01
申请人 BING-HUAN LEE 发明人 CHAO CHIH-YU;HSIEH WEN-JIUNN
分类号 H01J37/18 主分类号 H01J37/18
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