| 摘要 |
<p>A scanning stage is provided with a stage (9) for holding an observing sample and a scanning mechanism which can move the stage (9) in X, Y and Z directions. The scanning mechanism is provided with an XY stage composed of a movable section (4), an XY elastic member and Z elastic members (7A, 7B) and a fixing section (5); a fixing table (1) for fixing the XY stage; an X piezoelectric body (2A) for moving the movable section (4) in the X direction; a Y piezoelectric body for moving the movable section (4) in the Y direction; and a piezoelectric body (3) for moving the stage (9) in the Z direction. The Z piezoelectric body (3) is fixed on an upper plane of the movable section (4), and the stage (9) is fixed on an upper plane of the Z piezoelectric body (3) by a wax (10).</p> |
