LOW OVERHEAD CLOSED LOOP CONTROL SYSTEM

摘要

The disclosed tool includes a process chamber, a communications network, a pressure sensor, a tool controller, and a pressure controller. The communications network is configured to transmit messages to and from a plurality of devices coupled to the network. At least some of the messages include a header portion and a data portion. The header portion of a particular message indicates a sender of the particular message and at least one intended recipient of the particular message. The pressure sensor is configured to measure a pressure within the process chamber. The pressure sensor, tool controller, and pressure controller are all coupled to the communication network. The pressure controller is configured to control the pressure within the process chamber in response to measurements of the pressure within the process chamber provided by the pressure sensor and in response to a set point provided by the tool controller. The set point represents a desired pressure within the process chamber. The pressure controller includes a local message processor and a local control processor. The local message processor passes at least part of a data portion of a first set of messages and a second set of messages to the local control processor. Each message in the first set of messages has a header indicating the pressure controller as at least one of the intended recipients. At least some of the messages in the second set include headers that do not specify the pressure controller as one of the intended recipients.