| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the value of an equivalent series resistance R1; to heighten angular velocity detection sensitivity; and to speed up a starting time. <P>SOLUTION: This inertia sensor element 10 using a piezoelectric element is equipped with an oscillation arm performing bending vibration by an applied voltage, and a detection arm for detecting the charge generated by Coriolis force generated by the bending motion by the oscillation arm and by application of an angular velocity around a prescribed axis. The element 10 is also equipped with the first base 12A and an extension 111 extended from the first base 12A, a junction electrode 13 formed over the first base 12A and the extension 111, an electrode 14 formed on the extension 111 so as to be positioned oppositely to the junction electrode 13, the second base 12B and the extension 111 extended in parallel from the second base 12B, a junction electrode 13 formed over the second base 12B and the extension 112, and an electrode 14 formed on the extension 112 so as to be positioned oppositely to the junction electrode 13. <P>COPYRIGHT: (C)2007,JPO&INPIT |
