| 摘要 |
PROBLEM TO BE SOLVED: To provide a wet treatment apparatus that causes a small environmental load such as waste liquid, prevents an object to be treated from being electrically damaged, and has high throughput. SOLUTION: The wet treatment apparatus 1 comprises a nozzle body 2 having a slit-like discharge port 4; a water supply for supplying water to the inside of the nozzle body 2; and a radical generator 3 that is arranged at a position opposite to the discharge port 4 in the nozzle body 2, and radically activates water. The radical generator 3 has a sheet-like solid electrolyte 8 and a plurality of rod-shaped electrodes 6 arranged so that they are in contact with one surface at the side of the discharge port 4 of the solid electrolyte 8. COPYRIGHT: (C)2007,JPO&INPIT
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