| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard film coated member having high hardness and excellent peeling resistance of the entire hard film capable of considerably suppressing occurrence of peeling and abnormal wear, and improving the wear resistance under a severe wear environment. SOLUTION: In the hard film coated member consisting of a lowest layer, an intermediate lamination part, and a highest layer from the surface of a base body, the intermediate lamination part is a lamination part containing Al and Si as metal elements and formed of at least two layers composed of the oxynitride, boron nitride, and carbonate nitride composed of one or more kinds of metal elements selected from the balance Ti, Cr, Nb, and Y. In the intermediate lamination part, the contents of Al and Si is varied at the period of≥0.5 nm and < 50 nm in the layer thickness direction. COPYRIGHT: (C)2007,JPO&INPIT
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