| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration isolation system capable of accurately controlling a horizontal attitude of a vibration isolation table without depending on gravity positions of a moving body moving at high speed and a body of the vibration isolation system. <P>SOLUTION: The vibration isolation system comprises a stage controlling means 40 for recognizing a coordinates position of a X-Y stage 17, a gravity position calculating means 49 for calculating a gravity position G2 of the body 11 of the vibration isolation system, first compensating means 41A and 42A for compensating calculated values of a motion mode in response to the gravity position G2 of the body 11 of the vibration isolation system to first calculating means 41 and 42, second compensating means 43A and 44A for compensating calculated values of a motion mode in response to the gravity position G2 of the body 11 of the vibration isolation system to second calculating means 43 and 44, control amount compensating means 45A and 46A for compensating first and second control amounts in response to the gravity position G2 of the body 11 of the vibration isolation system to first and second control amount compensating means 45 and 46, and an actuator controlling means 47 for controlling an actuator in response to the first and second control amounts. <P>COPYRIGHT: (C)2007,JPO&INPIT |
