| 摘要 |
<P>PROBLEM TO BE SOLVED: To realize exposure with high precision by carrying out air-conditioning for suppressing a temperature distribution and temperature variation caused in a scanning direction. <P>SOLUTION: When a storage chamber 13 (exposure chamber 15) in a cover body 12 housing a primary device body 20 of an exposure device 10 is air-conditioned with cooling air produced by an air-conditioner, the cooling air blown out of a blowout hole 82B of a duct 82 into the exposure chamber 15 is directed to the scanning direction by an air direction change plate 90. A temperature distribution in the storage chamber 13 in the scanning direction becomes uniform with the cooling air blown in the scanning direction and the temperature does not apt to vary in the scanning direction. A photosensitive material 40 carried by a stage 28 in the scanning direction is deterred from thermally deforming owing to the temperature distribution and temperature variation in the scanning direction to have a decrease in precision such as a shift in exposure position. <P>COPYRIGHT: (C)2007,JPO&INPIT |
