发明名称 Carbon containing sputter target alloy compositions
摘要 <p>The invention provides a sputter target material. The sputter target material comprises an alloy system comprising Cr-C, Cr-M-C or Cr-M1-M2-C, wherein C comprises at least 0.5 and as much as 20 atomic percent; M comprises at least 0.5 and as much as 20 atomic percent and is an element selected from the group consisting of Ti, V, Y, Zr, Nb, Mo, Hf, Ta, and W; M1 comprises at least 0.5 and as much as 20 atomic percent and is an element selected from the group consisting of Ti, V, Zr, Nb, Mo, Hf, Ta, and W, and M2 comprises at least 0.5 and as much as 10 atomic percent and is an element selected from the group consisting of Li, Mg, Al, Sc, Mn, Y, and Te. A magnetic recording medium comprising a substrate and at least an underlayer comprising the sputter target material of the invention also is provided. A method of manufacturing a sputter target material further provided. The method can employ powder materials comprising a combination of elements can include a chromium alloy, a carbide or carbon containing master alloy. </p>
申请公布号 EP1662018(A3) 申请公布日期 2006.11.08
申请号 EP20050255241 申请日期 2005.08.25
申请人 HERAEUS, INC. 发明人 ZIANI, ABDELOUAHAB;LATHROP, MICHAEL;DARY, FRANCOIS C
分类号 C23C14/34;C22C27/06;G11B5/00 主分类号 C23C14/34
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