发明名称 |
APPARATUS FOR GENERATING PLASMA BY PLASMA-GUIDED MICROWAVE POWER |
摘要 |
An apparatus and method for generating a plasma within a volume containing a mixture of gaseous species. To generate the plasma, at least one large area applicator, which is a part of this invention, is employed. At least one microwave generator introduces microwave power into the applicator by means of suitable waveguides and couplers. |
申请公布号 |
EP0796355(A4) |
申请公布日期 |
2006.11.08 |
申请号 |
EP19960906164 |
申请日期 |
1996.01.11 |
申请人 |
DEPOSITION SCIENCES, INC. |
发明人 |
BOLING, NORMAN L. |
分类号 |
H05H1/46;C23C14/54;C23C14/56;C23C16/50;C23C16/511;H01J37/32;H01L21/302;H01L21/3065;H01L21/31 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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