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发明名称
PROCESS FOR REMOVING MICROBUBBLES FROM A LIQUID
摘要
申请公布号
EP1718387(A2)
申请公布日期
2006.11.08
申请号
EP20050705423
申请日期
2005.01.11
申请人
ENTEGRIS, INC.
发明人
YEN, LARRY;DUFFNER, JAY;LY, SAKSATHA
分类号
B01D19/00;B01D67/00;B01D71/40
主分类号
B01D19/00
代理机构
代理人
主权项
地址
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