METHOD AND APPARATUS FOR MAKING A MEMS SCANNER,申请号EP20050713180-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR MAKING A MEMS SCANNER
摘要
申请公布号	EP1719154(A2)	申请公布日期	2006.11.08
申请号	EP20050713180	申请日期	2005.02.09
申请人	MICROVISION, INC.	发明人	LINDEN, KELLY, D.;HELSEL, MARK, P.;BROWN, DEAN, R.;SPRAGUE, RANDALL, B.;DAVIS, WYATT, O.
分类号	G02B26/08;H01L21/00;B81B3/00;B81C1/00;G02B26/10;H01L21/78;H04N1/04	主分类号	G02B26/08
代理机构		代理人
主权项
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