GRADIENT DEPOSITION OF LOW-K CVD MATERIALS,申请号EP20040702191-传众专利搜索

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发明名称	GRADIENT DEPOSITION OF LOW-K CVD MATERIALS
摘要
申请公布号	EP1719181(A1)	申请公布日期	2006.11.08
申请号	EP20040702191	申请日期	2004.01.14
申请人	US	发明人	US;GB;GB;US;US
分类号	H01L21/316;H01L29/00;C23C16/40;C23C16/455	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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