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发明名称
SLURRY COMPOSITION FOR USE IN CHEMICAL MECHANICAL POLISHING OF METAL WIRING
摘要
申请公布号
EP1421610(B1)
申请公布日期
2006.11.08
申请号
EP20020755950
申请日期
2002.08.06
申请人
CHEIL INDUSTRIES INC.
发明人
LEE, JAE, SEOK;DO, WON, JOONG;ROH, HYUN, SOO;LEE, KIL, SUNG;LEE, JONG, WON,;YOON, BO, UN,;HAH, SANG, ROK,;PARK, JOON, SANG;HONG, CHANG, KI
分类号
H01L21/304;B24B37/00;C09G1/02;C09K3/14;H01L21/321
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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