摘要 |
The accelerometer has a base ( 2 ), an outer planar ring-like support frame ( 17 ) fixedly bonded to the base ( 2 ), and an inner planar ring-like support frame ( 18 ) flexibly suspended within the outer frame ( 17 ) by mounts ( 19 ) connecting the inner frame ( 18 ) to the outer frame ( 17 ) so that the inner frame ( 18 ) is spaced from the base ( 2 ), co-planar with the outer support fram ( 17 ) so as to provide flexible suspension for the inner support frame ( 18 ) reducing compressive and/or tensile forces on mounting legs ( 4 ) flexibly mounting a proof mass ( 3 ) in the inner support frame ( 18 ). |