| 摘要 |
A method for manufacturing an OLED(Organic Light Emitting Diode) panel is provided to deposit an organic substance and an inorganic substance on one substrate by using one deposition apparatus. After a substrate for an OLED panel is put in an inorganic deposition chamber, a gas of an inorganic substance is supplied in the chamber. After the inorganic substance is deposited on the substrate, a vacuum chamber is driven to exhaust a remaining gas. A ligand removing gas is supplied in the chamber, and an organic compound is removed to deposit a silicon thin film on the substrate. Then, after the substrate is put in an organic deposition chamber, a shadow mask is provided on a shadow mask support. An organic precursor is supplied in the chamber to deposit the precursor on the substrate. |
