| 摘要 |
<p>An in-line apparatus for a solar cell device manufacturing is provided to improve solar cell efficiency by using a dry etching apparatus for forming a texture. The in-line apparatus comprises a load and dry cleaning apparatus(1) using a transfer tray(7), a dry etching apparatus(2) for forming a texture, a plasma doping apparatus(3) for implanting impurities, a heating apparatus(4) for impurity activation and plasma chemical vapor deposition, a plasma chemical vapor deposition apparatus(5) for forming a device protective layer, and a cooling and unload apparatus(6) for unloading and cooling a sample. The dry etching apparatus for forming the texture improves solar cell efficiency.</p> |
