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经营范围
发明名称
SILICON-CONTAINING SPUTTERING TARGET
摘要
申请公布号
CA1341514(C)
申请公布日期
2006.11.07
申请号
CA19890617133
申请日期
1989.03.02
申请人
ASAHI GLASS COMPANY LTD.
发明人
SUZUKI, KOICHI;SUZUKI, SUSUMU;ANDO, EIICHI;EBISAWA, JUNICHI
分类号
C23C14/34;C03C17/245;C03C17/25;C03C17/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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