Chemically amplified positive resist composition

摘要

The present invention provide a chemically amplified positive resist composition comprising a resin which contains a structural unit having an acid labile group and which itself is insoluble or poorly soluble in an alkali aqueous solution and becomes soluble in an alkali aqueous solution by the action of an acid; an acid generator; and a compound of the formula (C-1) wherein R¹ and R² each independently represents a hydrogen or an alkyl having 1 to 4 carbon atoms, R³, R⁴ and R⁵ each independently represents a hydrogen or a hydroxyl.