发明名称 Wave interrogated near field array system and method for detection of subwavelength scale anomalies
摘要 An array of antenna elements ( 20 ) can be used to detect subwavelength sized anomalies on a surface below the array. An array ( 20 ) is illuminated at optical frequencies by a coherent optical energy source ( 26 ). The change in reactance and radiated power of the antenna elements that results from the proximity of the anomaly to the near field of the antenna element's open-circuited is detected and holographically filtered to eliminate the radiation caused by the antenna array itself. Image processing is performed on the detected scattered radiation ( 100 ) to determine whether an anomaly is present and to locate the anomaly and its characteristics.
申请公布号 US7132640(B2) 申请公布日期 2006.11.07
申请号 US20050505831 申请日期 2005.09.02
申请人 ARIZONA BOARD OF REGENTS 发明人 DIAZ RODOLFO E.;WATTS MICHAEL
分类号 G01B11/30;H01J3/14;G01N21/47;G01N21/94;G01N21/95;G01N21/958;H01L21/66 主分类号 G01B11/30
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