发明名称 |
Wave interrogated near field array system and method for detection of subwavelength scale anomalies |
摘要 |
An array of antenna elements ( 20 ) can be used to detect subwavelength sized anomalies on a surface below the array. An array ( 20 ) is illuminated at optical frequencies by a coherent optical energy source ( 26 ). The change in reactance and radiated power of the antenna elements that results from the proximity of the anomaly to the near field of the antenna element's open-circuited is detected and holographically filtered to eliminate the radiation caused by the antenna array itself. Image processing is performed on the detected scattered radiation ( 100 ) to determine whether an anomaly is present and to locate the anomaly and its characteristics.
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申请公布号 |
US7132640(B2) |
申请公布日期 |
2006.11.07 |
申请号 |
US20050505831 |
申请日期 |
2005.09.02 |
申请人 |
ARIZONA BOARD OF REGENTS |
发明人 |
DIAZ RODOLFO E.;WATTS MICHAEL |
分类号 |
G01B11/30;H01J3/14;G01N21/47;G01N21/94;G01N21/95;G01N21/958;H01L21/66 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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