Micro-mist generation method and apparatus

摘要

A liquid ( 10 ) stored in a generation chamber ( 2 ) is sprayed by an injection nozzle ( 33 ) using pressurized gas introduced to it. This strikes a buffer valve ( 4 ) where it is atomized. The generated mist is held in the generation chamber ( 2 ). The atomized generated mist is introduced into a particle classifier ( 5 ) and made to collide with a collision plate ( 52 ). The particles of less than 10 mum size bouncing off the collision plate are discharged as a micro-mist from a discharge port ( 56 ) and fed to a target workpiece. The large particles deposited on the collision plate are recovered in a generator.