发明名称 |
AOM modulation techniques employing plurality of transducers to improve laser system performance |
摘要 |
Digital control of frequency and/or amplitude modulation techniques of an intracavity and/or extracavity AOM ( 60 ) facilitate substantially full extinction of a laser beam ( 90 ) to prevent unwanted laser energy from impinging a workpiece ( 80 ); facilitate laser pulse amplitude stability through closed-loop control of pulse-to-pulse laser energy; facilitate beam-positioning control including, but not limited to, closed-loop control for applications such as alignment error correction, beam walk rectification, or tertiary positioning; and facilitate employment of more than one transducer on an AOM ( 60 ) to perform any of the above-listed applications.
|
申请公布号 |
US7133187(B2) |
申请公布日期 |
2006.11.07 |
申请号 |
US20050138076 |
申请日期 |
2005.05.25 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
JOHNSON JAY |
分类号 |
G02F1/33;B23K1/00;B23K26/04;B23K26/06;B23K26/08;G01N23/04;G02F1/01;G02F1/11;G02F1/29;H01S3/00;H01S3/11 |
主分类号 |
G02F1/33 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|