发明名称 AOM modulation techniques employing plurality of transducers to improve laser system performance
摘要 Digital control of frequency and/or amplitude modulation techniques of an intracavity and/or extracavity AOM ( 60 ) facilitate substantially full extinction of a laser beam ( 90 ) to prevent unwanted laser energy from impinging a workpiece ( 80 ); facilitate laser pulse amplitude stability through closed-loop control of pulse-to-pulse laser energy; facilitate beam-positioning control including, but not limited to, closed-loop control for applications such as alignment error correction, beam walk rectification, or tertiary positioning; and facilitate employment of more than one transducer on an AOM ( 60 ) to perform any of the above-listed applications.
申请公布号 US7133187(B2) 申请公布日期 2006.11.07
申请号 US20050138076 申请日期 2005.05.25
申请人 ELECTRO SCIENTIFIC INDUSTRIES, INC. 发明人 JOHNSON JAY
分类号 G02F1/33;B23K1/00;B23K26/04;B23K26/06;B23K26/08;G01N23/04;G02F1/01;G02F1/11;G02F1/29;H01S3/00;H01S3/11 主分类号 G02F1/33
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