发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 A semiconductor device and a manufacturing method thereof are provided to restrain a substrate from silicide in a bar type contact hole. First and second active regions are formed on a semiconductor substrate(50). An interlayer dielectric is formed on the semiconductor substrate. The interlayer dielectric has a bar type contact hole(70b) for exposing the first active region to the outside and a dot type contact hole(70d) for exposing the second active region. A semiconductor layer(71) is formed on the first active region in the bar type contact hole. A barrier metal(172) is formed along an upper surface of the resultant structure. A conductive layer is formed on resultant structure in order to fill completely the contact holes.
申请公布号 KR100645068(B1) 申请公布日期 2006.11.03
申请号 KR20050070321 申请日期 2005.08.01
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 YOON, JOO BYOUNG;KIM, JIN SUNG;OK, CHANG HYUK;LEE, KYUNG WOO;LEE, YEONG CHEOL;PARK, SANG JUN
分类号 H01L21/28 主分类号 H01L21/28
代理机构 代理人
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