发明名称 Substratträger für eine Halbleiterbehandlungskammer
摘要 A coating has a cylindrical body (914) comprising upper and lower edges, and a flange extending radially outwards from the upper edge. A recess (932) is formed in an outer surface of the body. A slit (938) is arranged in the recess and passes through the body, where the body is coated by yttrium or yttrium oxide. A lip (918) extends from an inner surface of the body in a radially inward manner, where the lip has an upper surface.
申请公布号 DE202006011604(U1) 申请公布日期 2006.11.02
申请号 DE20062011604U 申请日期 2006.07.28
申请人 APPLIED MATERIALS INC. 发明人
分类号 H01L21/673 主分类号 H01L21/673
代理机构 代理人
主权项
地址