INFRARED DETECTOR, AND INFRARED SOLID IMAGING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an infrared detector generating no inclination in a detection part or the like by an internal stress, and also to provide an infrared solid imaging device including the same.

SOLUTION: This substantially rectangular infrared detector for detecting a temperature change of the detection part by a detection film includes: a substrate; the detection part provided with the detection film; a support leg for supporting the detection part on the substrate; and a wiring layer provided in the support leg and connected to the detection film. The infrared detector has a structure to bring the support leg into a condition axisymmetric to a normal to a substrate surface, in an intersection of diagonal lines of the infrared detector. The infrared solid imaging device includes the infrared detectors arranged matrixlikely.

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